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Precision Slide Tables for Clean Room - 11/13/22-MX*

These precision slide table variations of series MXQ, MXS, MXP, MXJ, and MXPJ6 are specified for use in clean room environments.

13-MXS, Precision Slide Tables (Cross Roller Bearings) - Clean Room Series
The 13-MXS is a clean room, precision slide table integrated with guides and rails combined with cross roller bearings to isolate the load bearing from the movement of the dual rods and piston seals. Its surfaces are electroplated using RAYDENT treatment technology, completely integrating the RAYDENT coating with the base metal so the semi-permanent coating…
13-MXSL, Precision Slide Tables (Cross Roller Bearings) - Clean Room Series, Symmetrical Type
The 13-MXS*L is a clean room, precision slide table integrated with guides and rails combined with cross roller bearings to isolate the load bearing from the movement of the dual rods and piston seals. The ports and stroke adjuster positions are located opposite from the 13-MXS, clean room type in a symmetrical or mirror image…
13/22-MXQ, Precision Slide Tables (Recirculating Bearings) - Clean Room/Copper, Fluorine, Silicone-free Series
The 13/22-MXQ, clean room precision slide table uses a specially treated Martensitic stainless steel for its table and guide block to isolate the load bearing from the movement of the dual rods and pison seals to reduce particle generation. A relief plate was added to the body to house relief bushings and a vacuum port…
11/22-MXP, High Precision Slide Table (Recirculating Bearings) - Clean Room/Copper, Fluorine, Silicone-free Series
The 11/22-MXP clean room, high precision slide tables have travelling parallelism of 0.004 mm for all its bore sizes and non-rotating accuracy +/-0.03° for 6 and 10 mm bore sizes and non-rotating accuracy +/-0.04° for 12 and 16 mm bore sizes. Its actuator body and guide block are made from Martensitic stainless steel for high…
11/22-MXPJ6, Miniature High Precision Slide Table (Recirculating Bearings) - Clean Room/Copper, Fluorine, Silicone-free Series
The 11/22-MXPJ6 miniature high precision slide table provides travelling parallelism of 0.004 mm and non-rotating accuracy of +/-0.03° in a compact package, height: 17 mm and width: 20mm. Its actuator body and guide block are made from Martensitic stainless steel for high rigidity and integrated to guide rails for isolating the load bearing from the…
11-MXJ, Miniature Precision Slide Table (Linear Bearings) - Clean Room Series
The 11-MXJ miniature precision slide table provides travelling parallelism of 0.005 mm in a compact package, height: 10 mm and width: 20mm for the 4 mm bore size. . Its actuator body and guide block are made from Martensitic stainless steel for high rigidity and integrated to guide rails for isolating the load bearing from…

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