XLAV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The bellows assembly can be replaced, reducing maintenance costs and waste materials.
Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
High corrosion resistance to fluorine gas
Minimal outgassing
Minimal contamination from heavy metals
Optional heaters
Optional position sensors
Optional oxalic acid anodizing for internals
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